Equipment
- MOCVD
- SEM+EDX+EBSD
- XRD
- X-ray Topograph
- Ellipsometer
- FTIR
- Hall measurement system
- Atomic Layer Deposition
- Spatter Film Deposition
- Curve Tracer
- Prober for high current and high voltage devices
- Semiconductor parameter analyzer
- Nanoimprint
- PL Mapping system
- PL for low temp. system
- Scanning near field optical microscopy
- Deep level optical spectroscopy system
